Invention Grant
US07887994B2 Photoresist composition, coating method thereof, method of forming organic film pattern using the same and display device fabricated thereby
有权
光致抗蚀剂组合物,其涂布方法,使用其形成有机膜图案的方法和由其制造的显示装置
- Patent Title: Photoresist composition, coating method thereof, method of forming organic film pattern using the same and display device fabricated thereby
- Patent Title (中): 光致抗蚀剂组合物,其涂布方法,使用其形成有机膜图案的方法和由其制造的显示装置
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Application No.: US12024688Application Date: 2008-02-01
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Publication No.: US07887994B2Publication Date: 2011-02-15
- Inventor: Yeong Beom Lee , Kyung Seop Kim , Jun Young Lee , Sung Wook Kang
- Applicant: Yeong Beom Lee , Kyung Seop Kim , Jun Young Lee , Sung Wook Kang
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2007-0011271 20070202
- Main IPC: C08F2/46
- IPC: C08F2/46 ; C08J3/28

Abstract:
Disclosed herein is a photoresist composition suitable for coating onto a large substrate and having improved coating uniformity to prevent occurrence of stains, a coating method thereof, a method of forming an organic film pattern using the same, and a display device fabricated thereby. The present invention thus provides a photoresist composition comprising a polymeric resin with an incorporated polysiloxane resin, a photosensitive compound, and an organic solvent. Accordingly, the photoresist composition can be coated onto a large substrate by a spinless coating method, and thereby coating uniformity can be improved, the occurrence of stains such as cumulous stains and resin streaks can be prevented, and the coating rate and quality of a final product prepared using the photoresist composition can also thereby be enhanced.
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