发明授权
US07882626B2 Method of manufacturing wiring board having a semiconductor thereon
有权
制造其上具有半导体的布线板的方法
- 专利标题: Method of manufacturing wiring board having a semiconductor thereon
- 专利标题(中): 制造其上具有半导体的布线板的方法
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申请号: US12393478申请日: 2009-02-26
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公开(公告)号: US07882626B2公开(公告)日: 2011-02-08
- 发明人: Kei Murayama , Mitsutoshi Higashi , Masahiro Sunohara
- 申请人: Kei Murayama , Mitsutoshi Higashi , Masahiro Sunohara
- 申请人地址: JP Nagano-shi, Nagano
- 专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人地址: JP Nagano-shi, Nagano
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2008-050910 20080229
- 主分类号: H05K3/30
- IPC分类号: H05K3/30
摘要:
A method of manufacturing a wiring board having a semiconductor chip mounting surface for mounting a semiconductor chip thereon which is manufactured by a process including a step of forming a wiring layer and an insulating layer on a support board and a step of removing the support board, including a peeling layer forming step of forming a peeling layer on the support board formed by a material having a coefficient of thermal expansion which is equal to that of a semiconductor substrate constituting the semiconductor chip, and a support board removing step of removing the support board by carrying out a predetermined treatment over the peeling layer.
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