发明授权
- 专利标题: Thin film transistor and method of manufacturing the same
- 专利标题(中): 薄膜晶体管及其制造方法
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申请号: US11508530申请日: 2006-08-22
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公开(公告)号: US07868327B2公开(公告)日: 2011-01-11
- 发明人: Jae Kyeong Jeong , Hyun Soo Shin , Se Yeoul Kwon , Yeon Gon Mo
- 申请人: Jae Kyeong Jeong , Hyun Soo Shin , Se Yeoul Kwon , Yeon Gon Mo
- 申请人地址: KR Yongin
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR Yongin
- 代理机构: Knobbe Martens Olson & Bear, LLP.
- 优先权: KR10-2005-0109826 20051116; KR10-2005-0115112 20051129; KR10-2005-0115969 20051130; KR10-2005-0120898 20051209
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
A thin film transistor (TFT) and a method of manufacturing the same, and more particularly, a TFT for reducing leakage current and a method of manufacturing the same are provided. The TFT includes a flexible substrate, a diffusion preventing layer formed on the flexible substrate, a buffer layer formed of at least two insulated materials on the diffusion preventing layer, a semiconductor layer formed on a region of the buffer layer to include a channel layer and a source and drain region, a gate insulating layer formed on the buffer layer including the semiconductor layer, a gate electrode formed on the gate insulating layer in a region corresponding to the channel layer, an interlayer insulating layer formed on the gate insulating layer including the gate electrode, and source and drain electrodes formed in the interlayer insulating layer to include a predetermined contact hole that exposes at least a region of the source and drain region and to be connected to the source and drain region.
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