发明授权
US07834991B2 Determining surface properties with angle offset correction 有权
用角度偏移校正确定表面特性

  • 专利标题: Determining surface properties with angle offset correction
  • 专利标题(中): 用角度偏移校正确定表面特性
  • 申请号: US11774376
    申请日: 2007-07-06
  • 公开(公告)号: US07834991B2
    公开(公告)日: 2010-11-16
  • 发明人: Peter SchwarzKonrad Lex
  • 申请人: Peter SchwarzKonrad Lex
  • 申请人地址: DE
  • 专利权人: BYK Gardner GmbH
  • 当前专利权人: BYK Gardner GmbH
  • 当前专利权人地址: DE
  • 代理机构: Hayes Soloway P.C.
  • 优先权: DE102006032404 20060713; DE102006032405 20060713
  • 主分类号: G01N21/00
  • IPC分类号: G01N21/00
Determining surface properties with angle offset correction
摘要:
An apparatus for determining surface properties, comprises at least a first radiation device which emits radiation onto a surface to be analyzed, at least a first radiation detector device which receives at least part of the radiation emitted by the at least one radiation device and then scattered or reflected by the surface and outputs at least a first measurement signal which is characteristic of the reflected or scattered radiation, and at least a further radiation detector device which receives at least part of the radiation emitted by the at least one radiation device and then scattered or reflected by a surface and outputs at least a second measurement signal which is characteristic of the reflected or scattered radiation.
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