发明授权
US07829931B2 Nonvolatile memory devices having control electrodes configured to inhibit parasitic coupling capacitance
有权
具有配置成抑制寄生耦合电容的控制电极的非易失性存储器件
- 专利标题: Nonvolatile memory devices having control electrodes configured to inhibit parasitic coupling capacitance
- 专利标题(中): 具有配置成抑制寄生耦合电容的控制电极的非易失性存储器件
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申请号: US11670526申请日: 2007-02-02
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公开(公告)号: US07829931B2公开(公告)日: 2010-11-09
- 发明人: Bong-Tae Park , Jeong-Hyuk Choi
- 申请人: Bong-Tae Park , Jeong-Hyuk Choi
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec
- 优先权: KR10-2006-0101966 20061019
- 主分类号: H01L27/105
- IPC分类号: H01L27/105
摘要:
Non-volatile memory devices include a substrate with first and second semiconductor active regions therein. These active regions are separated from each other by a trench isolation region, which has a recess therein that extends along its length. First and second floating gate electrodes are provided. These first and second floating gate electrodes extend on the first and second semiconductor active regions, respectively. A control electrode is provided that extends between the first and second floating gate electrodes and into the recess in the trench isolation region. The recess in the trench isolation region is sufficiently deep so that the control electrode, which extends into the recess, operates to reduce (e.g., block) a parasitic coupling capacitance between the first and second floating gate electrodes.
公开/授权文献
- US20080093653A1 Nonvolatile Memory Devices and Methods for Forming Same 公开/授权日:2008-04-24
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