发明授权
- 专利标题: Method of separating semiconductor dies
- 专利标题(中): 分离半导体管芯的方法
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申请号: US11835289申请日: 2007-08-07
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公开(公告)号: US07829440B2公开(公告)日: 2010-11-09
- 发明人: Jiunn-Yi Chu , Chao-Chen Cheng , Chen-Fu Chu , Trung Tri Doan
- 申请人: Jiunn-Yi Chu , Chao-Chen Cheng , Chen-Fu Chu , Trung Tri Doan
- 申请人地址: TW Chu-Nan
- 专利权人: SemiLEDS Optoelectronics Co. Ltd.
- 当前专利权人: SemiLEDS Optoelectronics Co. Ltd.
- 当前专利权人地址: TW Chu-Nan
- 代理机构: Patterson & Sheridan, L.L.P.
- 主分类号: H01L21/301
- IPC分类号: H01L21/301
摘要:
A method for the separation of multiple dies during semiconductor fabrication is described. On an upper surface of a semiconductor wafer containing multiple dies, a seed metal layer may be used to grow hard metal layers above it for handling. Metal may be plated above these metal layers everywhere except where a block of stop electroplating (EP) material exists. The stop EP material may be obliterated, and a barrier layer may be formed above the entire remaining structure. The substrate may be removed, and the individual dies may have any desired bonding pads and/or patterned circuitry added to the semiconductor surface. The remerged hard metal after laser cutting and heating should be strong enough for handling. Tape may be added to the wafer, and a breaker may be used to break the dies apart. The resulting structure may be flipped over, and the tape may be expanded to separate the individual dies.
公开/授权文献
- US20080032488A1 METHOD OF SEPARATING SEMICONDUCTOR DIES 公开/授权日:2008-02-07
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