发明授权
- 专利标题: Carrier robot system and control method for carrier robot
- 专利标题(中): 载体机器人系统和载体机器人的控制方法
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申请号: US10521572申请日: 2003-05-15
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公开(公告)号: US07805219B2公开(公告)日: 2010-09-28
- 发明人: Shinichi Ishikawa , Hitoshi Wakizako , Kazunari Shiraishi
- 申请人: Shinichi Ishikawa , Hitoshi Wakizako , Kazunari Shiraishi
- 申请人地址: JP Fukuoka
- 专利权人: Kabushiki Kaisha Yaskawa Denki
- 当前专利权人: Kabushiki Kaisha Yaskawa Denki
- 当前专利权人地址: JP Fukuoka
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2002-207675 20020717
- 国际申请: PCT/JP03/06085 WO 20030515
- 国际公布: WO2004/007150 WO 20040122
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G06F7/00 ; H02P3/00
摘要:
A carrier robot system and a control method for a carrier robot enabling teaching even when an operator cannot approach a teaching position for wafer conveyance are provided. In a carrier robot system comprising a robot which has a placement portion for placing an object presenting a low-profile form thereon and carries the object and a robot controller for controlling the robot, a jig mounted on the placement portion of the robot and having an image pickup member, an image processing portion for processing an image picked up by the image pickup member, and a superior control portion for controlling the robot controller and image processing portion from a superior position are provided.
公开/授权文献
- US20060106497A1 Carriage robot system and its controlling method 公开/授权日:2006-05-18
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