发明授权
- 专利标题： Specimen holding device and charged particle beam device
- 专利标题（中）： 标本夹持装置和带电粒子束装置
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申请号： US11699066申请日： 2007-01-29
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公开(公告)号： US07772567B2公开(公告)日： 2010-08-10
- 发明人: Susumu Kato
- 申请人： Susumu Kato
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2006-047672 20060224
- 主分类号： G01F23/00
- IPC分类号： G01F23/00 ; G21K5/08 ; G21K5/10
摘要：
A specimen holding device has a plurality of electrodes, and a moving mechanism for moving upward and downward a part of the plurality of electrodes. Further, the moving mechanism moves the part of the plurality of electrodes downward to evacuate from a path through which a specimen is introduced. Further, the specimen holding device has a positioning member for the specimen so that the specimen is positioned after being mounted.
公开/授权文献
- US20070210261A1 Specimen holding device and charged particle beam device 公开/授权日：2007-09-13
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