Invention Grant
US07759955B2 Method and device for position detection using connection pads 有权
使用连接垫进行位置检测的方法和装置

Method and device for position detection using connection pads
Abstract:
A semiconductor and method is disclosed. One embodiment includes a detector arrangement to detect the position of a connection element. A probe tip, the detector arrangement including first connection pads are arranged on a substrate surface. A first circuit is connected to the first connection pads.
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