Invention Grant
US07724349B2 Device arranged to measure a quantity relating to radiation and lithographic apparatus 失效
用于测量与辐射和光刻设备有关的数量的设备

Device arranged to measure a quantity relating to radiation and lithographic apparatus
Abstract:
A device is arranged to measure a quantity relating to radiation. The device includes a sensor configured to measure the quantity, a screen arranged to protect the sensor from incoming particles emitted from a source configured to emit extreme ultraviolet radiation, and a mirror configured to redirect extreme ultraviolet radiation emitted by the source, past the screen, to the sensor.
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