发明授权
US07696561B2 Non-volatile memory device, method of manufacturing the same and method of operating the same 失效
非易失性存储器件,其制造方法及其操作方法

Non-volatile memory device, method of manufacturing the same and method of operating the same
摘要:
A non-volatile memory device includes a first sensing line, a first word line, a depletion channel region, and impurity regions. The first sensing line and the first word line are formed adjacent to each other in parallel on a substrate. The first sensing line and the first word line have a tunnel oxide layer, a first conductive pattern, a dielectric layer pattern and a second conductive pattern sequentially stacked on the substrate. The depletion channel region is formed at an upper portion of the substrate under the first sensing line. The impurity regions are formed at upper portions of the substrate exposed by the first sensing line and the first word line.
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