发明授权
- 专利标题: Non-volatile memory device, method of manufacturing the same and method of operating the same
- 专利标题(中): 非易失性存储器件,其制造方法及其操作方法
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申请号: US11870762申请日: 2007-10-11
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公开(公告)号: US07696561B2公开(公告)日: 2010-04-13
- 发明人: Hyun-Khe Yoo , Jeong-Uk Han , Hee-Seog Jeon , Sung-Gon Choi , Bo-Young Seo , Chang-Min Jeon , Ji-Do Ryu
- 申请人: Hyun-Khe Yoo , Jeong-Uk Han , Hee-Seog Jeon , Sung-Gon Choi , Bo-Young Seo , Chang-Min Jeon , Ji-Do Ryu
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR10-2006-0099600 20061013
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A non-volatile memory device includes a first sensing line, a first word line, a depletion channel region, and impurity regions. The first sensing line and the first word line are formed adjacent to each other in parallel on a substrate. The first sensing line and the first word line have a tunnel oxide layer, a first conductive pattern, a dielectric layer pattern and a second conductive pattern sequentially stacked on the substrate. The depletion channel region is formed at an upper portion of the substrate under the first sensing line. The impurity regions are formed at upper portions of the substrate exposed by the first sensing line and the first word line.
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