Invention Grant
US07684887B2 Advanced process control method and advanced process control system for acquiring production data in a chip production installation
有权
先进的过程控制方法和先进的过程控制系统，用于在芯片生产设备中获取生产数据
- Patent Title: Advanced process control method and advanced process control system for acquiring production data in a chip production installation
- Patent Title (中): 先进的过程控制方法和先进的过程控制系统，用于在芯片生产设备中获取生产数据
-
Application No.: US10427308Application Date: 2003-04-30
-
Publication No.: US07684887B2Publication Date: 2010-03-23
- Inventor: Almuth Behrisch , Thomas Darnhofer-Demar , Hans-Peter Erb
- Applicant: Almuth Behrisch , Thomas Darnhofer-Demar , Hans-Peter Erb
- Applicant Address: DE
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE
- Agency: Altera Law Group, LLC
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
For monitoring production data, a grouping table in which machines are grouped into machine groups, machine components are grouped into machine component groups, chip manufacturing recipes are grouped into recipe groups or chip manufacturing parameters are grouped into parameter groups is used, whereby a considerable improvement in the comparability of the production data to be monitored is achieved.
Public/Granted literature
Information query
