发明授权
US07684887B2 Advanced process control method and advanced process control system for acquiring production data in a chip production installation
有权
先进的过程控制方法和先进的过程控制系统，用于在芯片生产设备中获取生产数据
- 专利标题： Advanced process control method and advanced process control system for acquiring production data in a chip production installation
- 专利标题（中）： 先进的过程控制方法和先进的过程控制系统，用于在芯片生产设备中获取生产数据
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申请号： US10427308申请日： 2003-04-30
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公开(公告)号： US07684887B2公开(公告)日： 2010-03-23
- 发明人: Almuth Behrisch , Thomas Darnhofer-Demar , Hans-Peter Erb
- 申请人： Almuth Behrisch , Thomas Darnhofer-Demar , Hans-Peter Erb
- 申请人地址： DE
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： DE
- 代理机构： Altera Law Group, LLC
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
For monitoring production data, a grouping table in which machines are grouped into machine groups, machine components are grouped into machine component groups, chip manufacturing recipes are grouped into recipe groups or chip manufacturing parameters are grouped into parameter groups is used, whereby a considerable improvement in the comparability of the production data to be monitored is achieved.
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