发明授权
- 专利标题: Dynamic quantity sensor
- 专利标题(中): 动态量传感器
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申请号: US11709271申请日: 2007-02-22
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公开(公告)号: US07671432B2公开(公告)日: 2010-03-02
- 发明人: Tetsuo Fujii
- 申请人: Tetsuo Fujii
- 申请人地址: JP Kariya
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2002-323896 20021107; JP2003-348253 20031007
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H01L25/07 ; G01P9/04 ; G01C19/56
摘要:
A dynamic quantity sensor includes a sensor chip having a movable portion at one surface side thereof and a silicon layer at another surface side thereof. The movable portion is displaced under application of a dynamic quantity. The silicon layer is separated from the movable portion through an insulator. The dynamic quantity sensor also includes a circuit chip for transmitting/receiving electrical signals to/from the sensor chip. The circuit chip is disposed to confront the one surface of the sensor chip through a gap portion and cover the movable portion. The sensor chip and the circuit chip are bonded to each other around the gap portion so that a bonding portion is formed to substantially surround the gap portion and thereby seal the gap portion.
公开/授权文献
- US20070158822A1 Dynamic quantity sensor 公开/授权日:2007-07-12
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