发明授权
US07595528B2 Nano-enabled memory devices and anisotropic charge carrying arrays
有权
具有纳米功能的存储器件和各向异性带电载体阵列
- 专利标题: Nano-enabled memory devices and anisotropic charge carrying arrays
- 专利标题(中): 具有纳米功能的存储器件和各向异性带电载体阵列
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申请号: US11018572申请日: 2004-12-21
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公开(公告)号: US07595528B2公开(公告)日: 2009-09-29
- 发明人: Xiangfeng Duan , Calvin Y. H. Chow , David L. Heald , Chunming Niu , J. Wallace Parce , David P. Stumbo
- 申请人: Xiangfeng Duan , Calvin Y. H. Chow , David L. Heald , Chunming Niu , J. Wallace Parce , David P. Stumbo
- 申请人地址: US CA Palo Alto
- 专利权人: Nanosys, Inc.
- 当前专利权人: Nanosys, Inc.
- 当前专利权人地址: US CA Palo Alto
- 代理商 Andrew L. Filler
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Methods and apparatuses for nanoenabled memory devices and anisotropic charge carrying arrays are described. In an aspect, a memory device includes a substrate, a source region of the substrate, and a drain region of the substrate. A population of nanoelements is deposited on the substrate above a channel region, the population of nanolements in one embodiment including metal quantum dots. A tunnel dielectric layer is formed on the substrate overlying the channel region, and a metal migration barrier layer is deposited over the dielectric layer. A gate contact is formed over the thin film of nanoelements. The nanoelements allow for reduced lateral charge transfer. The memory device may be a single or multistate memory device. In a multistate memory device which comprises one or more quantum dots or molecules having a plurality of discrete energy levels, a method is disclosed for charging and/or discharging the device which comprises filling each of the plurality of discrete energy levels of each dot or molecule with one or more electrons, and subsequently removing individual electrons at a time from each discrete energy level of the one or more dots or molecules.
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