发明授权
- 专利标题: High performance FET with elevated source/drain region
- 专利标题(中): 具有升高的源极/漏极区域的高性能FET
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申请号: US10996866申请日: 2004-11-24
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公开(公告)号: US07566599B2公开(公告)日: 2009-07-28
- 发明人: Rama Divakaruni , Louis C. Hsu , Rajiv V. Joshi , Carl J. Radens
- 申请人: Rama Divakaruni , Louis C. Hsu , Rajiv V. Joshi , Carl J. Radens
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Law Office of Charles W. Peterson, Jr.
- 代理商 Louis J. Percello, Esq.; Brian P. Virminski, Esq.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETs. The FETs include a thin channel with raised source/drain (RSD) regions at each end on an insulator layer, e.g., on an ultra-thin silicon on insulator (SOI) chip. Isolation trenches at each end of the FETs, i.e., at the end of the RSD regions, isolate and define FET islands. Insulating sidewalls at each RSD region sandwich the FET gate between the RSD regions. The gate dielectric may be a high K dielectric. Salicide on the RSD regions and, optionally, on the gates reduce device resistances.
公开/授权文献
- US20050260801A1 High performance FET with elevated source/drain region 公开/授权日:2005-11-24
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