发明授权
- 专利标题: Cleaning solution for removing photoresist
- 专利标题(中): 用于除去光致抗蚀剂的清洁溶液
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申请号: US10317578申请日: 2002-12-12
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公开(公告)号: US07563753B2公开(公告)日: 2009-07-21
- 发明人: Geun Su Lee , Jae Chang Jung , Ki Soo Shin , Keun Kyu Kong , Sung Koo Lee , Young Sun Hwang
- 申请人: Geun Su Lee , Jae Chang Jung , Ki Soo Shin , Keun Kyu Kong , Sung Koo Lee , Young Sun Hwang
- 申请人地址: KR Gyeonggi-do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: KR2001-78470 20011212; KR2001-79354 20011214; KR2001-79355 20011214; KR2001-80572 20011218; KR2001-80573 20011218; KR2001-80574 20011218; KR2001-80575 20011218
- 主分类号: C11D7/50
- IPC分类号: C11D7/50
摘要:
Cleaning solutions for removing photoresist resins and a method of forming patterns using the same are disclosed. The cleaning solution includes water (H2O) as main component, one or more surfactants as additive selected from the group consisting of polyoxyalkylene compounds, a salt of alcohol amine of Formula 1 and hydrocarbon compounds having carboxylic acid (—COOH) group, a salt of alcohol amine of Formula 1 and hydrocarbon compounds having sulfonic acid (—SO3H) group, polyethylene glycol compounds, compounds of Formula 3, compounds having a molecular weight ranging from 1000 to 10000 including repeating unit of Formula 4, polyether denatured silicon compounds and alcohol compounds. wherein R1, R2, R3, R4, R5, A, l and n are defined in the specification.
公开/授权文献
- US20030130148A1 Cleaning solution for removing photoresist 公开/授权日:2003-07-10
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