发明授权
- 专利标题： Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof
- 专利标题（中）： 具有公共接地层和一组接触齿的微机电装置及其制造方法
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申请号： US11332715申请日： 2006-01-13
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公开(公告)号： US07545234B2公开(公告)日： 2009-06-09
- 发明人: Chia-Shing Chou
- 申请人： Chia-Shing Chou
- 申请人地址： US CA Oak Park
- 专利权人： Wireless MEMS, Inc.
- 当前专利权人： Wireless MEMS, Inc.
- 当前专利权人地址： US CA Oak Park
- 代理机构： Tope-Mckay & Associates
- 主分类号： H01H51/22
- IPC分类号： H01H51/22
摘要：
The present invention relates to MEM switches. More specifically, the present invention relates to a system and method for making MEM switches having a common ground plane. One method for making MEM switches includes: patterning a common ground plane layer on a substrate; forming a dielectric layer on the common ground plane layer; depositing a DC electrode region through the dielectric layer to contact the common ground plane layer; and depositing a conducting layer on the DC electrode region so that regions of the conducting layer contact the DC electrode region, so that the common ground plane layer provides a common ground for the regions of the conducting layer.
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