Invention Grant
- Patent Title: Techniques for reducing effects of photoresist outgassing
- Patent Title (中): 降低光致抗蚀剂脱气效果的技术
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Application No.: US11567522Application Date: 2006-12-06
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Publication No.: US07476878B2Publication Date: 2009-01-13
- Inventor: Russell J. Low , Jonathan Gerald England , Stephen E. Krause , Eric D. Hermanson
- Applicant: Russell J. Low , Jonathan Gerald England , Stephen E. Krause , Eric D. Hermanson
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317

Abstract:
Techniques for reducing effects of photoresist outgassing are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for reducing effects of photoresist outgassing in an ion implanter. The apparatus may comprise a drift tube located between an end-station and an upstream beamline component. The apparatus may also comprise a first variable aperture between the drift tube and the end-station. The apparatus may further comprise a second variable aperture between the drift tube and the upstream beamline component. The first variable aperture and the second variable aperture can be adjusted to facilitate differential pumping.
Public/Granted literature
- US20070125957A1 TECHNIQUES FOR REDUCING EFFECTS OF PHOTORESIST OUTGASSING Public/Granted day:2007-06-07
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