发明授权
- 专利标题: Vacuum plasma generator
- 专利标题(中): 真空等离子发生器
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申请号: US11817443申请日: 2006-03-20
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公开(公告)号: US07455755B2公开(公告)日: 2008-11-25
- 发明人: Gerhard Tuymer , Jürgen Ramm , Daniel Lendi
- 申请人: Gerhard Tuymer , Jürgen Ramm , Daniel Lendi
- 申请人地址: CH Trubbach
- 专利权人: Oerlikon Trading AG, Trubbach
- 当前专利权人: Oerlikon Trading AG, Trubbach
- 当前专利权人地址: CH Trubbach
- 代理机构: Notaro & Michalos P.C.
- 优先权: CH0518/05 20050324; CH1290/05 20050803
- 国际申请: PCT/CH2006/000124 WO 20060320
- 国际公布: WO2006/099759 WO 20060928
- 主分类号: C23C14/00
- IPC分类号: C23C14/00
摘要:
The invention relates to a vacuum plasma generator for providing a plasma discharge (10) for treating work pieces (5) by way of a pulsed plasma process in a vacuum chamber (2). Said vacuum plasma generator comprises a generator output (9, 9′) having an AC mains supply (6a), an AC/DC mains rectifier system (6) for rectifying the AC mains voltage to a DC voltage, a filter capacitor (6b), a first stage as clocked DC/DC voltage converter (7) with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch (7a) which feeds the primary winding of a transformer (14) and the secondary winding of which is connected to a rectifier (15) and a downstream intermediate capacitor (12) and configures a floating transformer secondary circuit (23). Said secondary circuit is connected to a downstream second stage which is a pulse output stage (8) and is connected to the generator output (9, 9′). The DC/DC voltage converter (7) has at least two floating transformer secondary circuits (23) and comprises a switch-over device (20) with a switch controller (22) for optionally switching the floating transformer secondary circuits (23) in parallel or in series.
公开/授权文献
- US20080143260A1 Vacuum Plasma Generator 公开/授权日:2008-06-19
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