发明授权
- 专利标题: Wafer electroplating apparatus
- 专利标题(中): 晶圆电镀设备
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申请号: US11073655申请日: 2005-03-08
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公开(公告)号: US07449091B2公开(公告)日: 2008-11-11
- 发明人: Chen-Chung Du , Jen-Rong Huang , Pang-Ming Chiang , Chih-Yuan Tseng , Muh-Wang Liang , Chih-Cheng Wang , Yi-Chao Weng
- 申请人: Chen-Chung Du , Jen-Rong Huang , Pang-Ming Chiang , Chih-Yuan Tseng , Muh-Wang Liang , Chih-Cheng Wang , Yi-Chao Weng
- 申请人地址: TW Hsinchu Hsien
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu Hsien
- 代理机构: Rosenberg, Klein & Lee
- 优先权: TW93140351A 20041223
- 主分类号: B01D19/00
- IPC分类号: B01D19/00 ; C25B15/00
摘要:
A wafer electroplating apparatus with a function of bubble removal includes an electroplating bath main body and a fixing device. The electroplating bath main body has an inlet device, a first de-bubble tank and at least an air hole. The fixing device has a second de-bubble tank and an outer shell. The air hole guides gathering bubbles to an outside of the electroplating bath main body so as to remove bubbles. The fixing device can be put into the first de-bubble tank within the electroplating bath main body to form a de-bubble area and is separated easily therefrom to clean the wafer electroplating apparatus. The electroplating bath main body further includes a baffle for rectifying electroplating solution flow before entering the inlet device.
公开/授权文献
- US20060137974A1 Wafer electroplating apparatus 公开/授权日:2006-06-29
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