发明授权
- 专利标题: Kinematic coupling with textured contact surfaces
- 专利标题(中): 具有纹理接触表面的运动耦合
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申请号: US11339462申请日: 2006-01-25
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公开(公告)号: US07422107B2公开(公告)日: 2008-09-09
- 发明人: John Burns , Martin L. Forbes , Matthew A. Fuller , Jeffery J. King , Mark V. Smith
- 申请人: John Burns , Martin L. Forbes , Matthew A. Fuller , Jeffery J. King , Mark V. Smith
- 申请人地址: US MN Chaska
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MN Chaska
- 代理机构: Patterson, Thuente, Skaar & Christensen, P.A.
- 主分类号: B65D85/86
- IPC分类号: B65D85/86
摘要:
A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.
公开/授权文献
- US20070170089A1 Kinematic coupling with textured contact surfaces 公开/授权日:2007-07-26
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