Invention Grant
- Patent Title: Method of performing optical measurement on a sample
- Patent Title (中): 对样品进行光学测量的方法
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Application No.: US10995520Application Date: 2004-11-24
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Publication No.: US07369234B2Publication Date: 2008-05-06
- Inventor: David Beaglehole
- Applicant: David Beaglehole
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Harrington & Smith, PC
- Priority: NZ523937 20030203; NZ527516 20030812; NZ533343 20040604
- Main IPC: G01J4/02
- IPC: G01J4/02 ; G02F1/01

Abstract:
The invention relates to a method of performing an optical measurement on a sample, such as an ellipticity measurement. The sample is irradiated with a polarized irradiation beam and a return beam is linearly polarized. The irradiation or return beam is modulated with a birefringence modulator, such as a photoelastic modulator, in accordance with a primary modulation signal. The return beam is directed onto a multichannel detector. Typically the detector is a slow detector, such as a CCD, having a response time greater than a period of the primary modulation signal. Detection values are generated simultaneously at each detection element and processed to determine a plurality of measurements. Various measurement techniques are described, including detector signal averaging over gated intervals; a design employing coherent modulation of the gain of an ICCD , and a modulator-coherent flash lamp design.
Public/Granted literature
- US20050134849A1 Method of performing optical measurement on a sample Public/Granted day:2005-06-23
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