Invention Grant
US07354787B2 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure 有权
电极设计和定位,用于可移动电极和相关支撑结构的受控运动

Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
Abstract:
A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
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