Invention Grant
- Patent Title: Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
- Patent Title (中): 电极设计和定位,用于可移动电极和相关支撑结构的受控运动
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Application No.: US11096840Application Date: 2005-03-30
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Publication No.: US07354787B2Publication Date: 2008-04-08
- Inventor: John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
- Applicant: John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
- Applicant Address: US CT Norwalk
- Assignee: Xerox Corporation
- Current Assignee: Xerox Corporation
- Current Assignee Address: US CT Norwalk
- Agent Kent Chen
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
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