发明授权
US07352266B2 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
有权
头电极区域用于可靠的金属 - 金属接触微型继电器MEMS开关
- 专利标题: Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
- 专利标题(中): 头电极区域用于可靠的金属 - 金属接触微型继电器MEMS开关
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申请号: US10994704申请日: 2004-11-20
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公开(公告)号: US07352266B2公开(公告)日: 2008-04-01
- 发明人: Chia-Shing Chou
- 申请人: Chia-Shing Chou
- 申请人地址: US CA Oak Park
- 专利权人: Wireless MEMS, Inc.
- 当前专利权人: Wireless MEMS, Inc.
- 当前专利权人地址: US CA Oak Park
- 代理机构: Tope-McKay & Associates
- 主分类号: H01H51/22
- IPC分类号: H01H51/22
摘要:
A head electrode region for an electromechanical device is presented, comprising a first insulating layer having electrode region edges; and a head electrode, where the head electrode comprises a locking portion, with the locking portion surrounding the electrode region edges of the first insulating layer such that the head electrode is held fixed relative to the first insulating layer. The head electrode region can further comprise a top region residing above the first insulating layer and a contact region residing below the first insulator, the head electrode region further comprising a second insulating layer formed to cover at least a portion of the top region of the head electrode.
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