Invention Grant
- Patent Title: Wafer carrier with apertured door for cleaning
- Patent Title (中): 晶圆托架带有多孔清洁
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Application No.: US10983107Application Date: 2004-11-05
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Publication No.: US07344030B2Publication Date: 2008-03-18
- Inventor: John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
- Applicant: John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
- Applicant Address: US MN Chaska
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MN Chaska
- Agency: Patterson, Thuente, Skaar & Christensen, P.A.
- Main IPC: B65D85/48
- IPC: B65D85/48
Abstract:
A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
Public/Granted literature
- US20050115591A1 Wafer carrier door Public/Granted day:2005-06-02
Information query
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