Invention Grant
- Patent Title: Method for fabricating flash memory device
- Patent Title (中): 闪存器件制造方法
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Application No.: US11695052Application Date: 2007-04-01
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Publication No.: US07303960B1Publication Date: 2007-12-04
- Inventor: Chang-Ho Yeh , Chang-Ming Wu , Jhong-Ciang Min
- Applicant: Chang-Ho Yeh , Chang-Ming Wu , Jhong-Ciang Min
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu
- Priority: TW96108301A 20070309
- Main IPC: H01L21/8247
- IPC: H01L21/8247

Abstract:
A method for fabricating a flash memory device including the steps of: providing a substrate having thereon a gate with therein a control gate; lining the substrate and the gate with a liner; forming a silicon layer on the liner; forming a sacrificing layer on the silicon layer; etching the sacrificing layer to expose a portion of the silicon layer; removing the exposed silicon layer to expose a portion of the liner; removing the sacrificing layer; forming a spacer layer on the substrate covering the remaining silicon layer and the exposed liner; etching the spacer layer to form a spacer on sidewall of the gate; and removing the silicon layer that is not covered by the spacer thereby forming floating gate on sidewall of the gate.
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