Invention Grant
- Patent Title: Multi-function teach pendant for a semiconductor manufacturing environment
- Patent Title (中): 多功能教学用于半导体制造环境
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Application No.: US10939863Application Date: 2004-09-13
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Publication No.: US07286896B2Publication Date: 2007-10-23
- Inventor: Te-Hsiang Liu , Yu-Wen Fang , Chao-Ying Chiu
- Applicant: Te-Hsiang Liu , Yu-Wen Fang , Chao-Ying Chiu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
Provided are a device and method for a programmable hand-held device for use in a semiconductor manufacturing environment. In one example, the device includes an interface, a processor, an input device, and a memory. The interface may establish a connection between the device and at least one of the process tools. The processor may process executable instructions. The input device may receive input instructions for programming a specific type of tool. The memory contains the executable instructions, which may be divided into multiple subsets of instructions, where each subset is adapted for communication with a specific type of tool. The instructions may include identifying the specific type of tool referenced by the input instructions, selecting the subset of instructions adapted for communication with the selected specific type of tool, and programming the selected specific type of tool via the interface using the subset of instructions and the input instructions.
Public/Granted literature
- US20060058894A1 Multi-function teach pendant for a semiconductor manufacturing environment Public/Granted day:2006-03-16
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