发明授权
- 专利标题: Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same
- 专利标题(中): 用于有机抗反射涂层的光吸收剂聚合物,其制备方法和包含其的有机抗反射涂料组合物
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申请号: US10963129申请日: 2004-10-12
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公开(公告)号: US07285370B2公开(公告)日: 2007-10-23
- 发明人: Jae Chang Jung , Keun Kyu Kong , Jin-soo Kim
- 申请人: Jae Chang Jung , Keun Kyu Kong , Jin-soo Kim
- 申请人地址: KR Kyungki-Do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Kyungki-Do
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: KR10-2003-0071916 20031015
- 主分类号: C03C1/825
- IPC分类号: C03C1/825 ; C08F122/04
摘要:
Disclosed are a light absorbent agent polymer for organic anti-reflective coating which can prevent diffused light reflection of bottom film layer or substrate and reduce standing waves caused by a variation of thickness of the photoresist itself, thereby, increasing uniformity of the photoresist pattern, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF among processes for manufacturing semiconductor devices, and its preparation method. Also, the present invention discloses an organic anti-reflective coating composition comprising a light absorbent agent polymer for the organic anti-reflective coating and a pattern formation process using the coating composition.
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