Invention Grant
- Patent Title: Probe card, having cantilever-type probe and method
- Patent Title (中): 探头卡，具有悬臂式探头和方法
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Application No.: US10284085Application Date: 2002-10-31
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Publication No.: US07256591B2Publication Date: 2007-08-14
- Inventor: Tsutomu Tatematsu , Kenji Togashi , Tetsuhiro Nanbu , Shigenobu Ishihara , Morihiko Hamada , Yoshikazu Arisaka , Kunihiro Itagaki , Shigekazu Aoki
- Applicant: Tsutomu Tatematsu , Kenji Togashi , Tetsuhiro Nanbu , Shigenobu Ishihara , Morihiko Hamada , Yoshikazu Arisaka , Kunihiro Itagaki , Shigekazu Aoki
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas and Halsey LLP
- Priority: JP2001-364108 20011129; JP2002-138078 20020514
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
A probe card is used to test an electronic device. The probe card includes a base plate and a cantilever-type probe arranged on the base plate. The cantilever-type probe has an end that contacts the contacted body and moves when contacting the contacted body. A stopper arranged on the base plate restricts the movement of the cantilever-type probe.
Public/Granted literature
- US20030098701A1 Probe card, semiconductor device testing apparatus, and probe contact method Public/Granted day:2003-05-29
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