Invention Grant
- Patent Title: Radiantly heated cathode for an electron gun and heating assembly
- Patent Title (中): 用于电子枪和加热组件的辐射加热阴极
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Application No.: US11050394Application Date: 2005-02-02
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Publication No.: US07250618B2Publication Date: 2007-07-31
- Inventor: Michael Sogard , Mark Takita
- Applicant: Michael Sogard , Mark Takita
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agent Steven G. Roeder; James P. Broder
- Main IPC: G21K5/10
- IPC: G21K5/10 ; G01N23/04
Abstract:
A heating assembly (36) for heating a cathode (38) of an electron gun (30) of an exposure apparatus (10) includes a radiation source (42) and a beam shaper (44). The radiation source (42) generates a source beam (46). The beam shaper (44) receives the source beam (46) and selectively shapes the source beam (46) into a shaped beam (48) that is directed to the cathode (38). In certain embodiments, the beam shaper (44) can readily change the shape and intensity profile of the shaped beam (48) to achieve a desired electron beam (32) from the electron gun (30). In one embodiment, the radiation source (42) generates a pulsed source beam (46).
Public/Granted literature
- US20060169928A1 Radiantly heated cathode for an electron gun and heating assembly Public/Granted day:2006-08-03
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