Invention Grant
- Patent Title: Double-gate FETs (Field Effect Transistors)
- Patent Title (中): 双栅极FET(场效应晶体管)
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Application No.: US10905979Application Date: 2005-01-28
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Publication No.: US07250347B2Publication Date: 2007-07-31
- Inventor: Toshiharu Furukawa , Mark C. Hakey , Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Peter H. Mitchell , Larry A. Nesbit
- Applicant: Toshiharu Furukawa , Mark C. Hakey , Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Peter H. Mitchell , Larry A. Nesbit
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent William D. Sabo
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for forming transistors with mutually-aligned double gates. The method includes the steps of (a) providing a wrap-around-gate transistor structure, wherein the wrap-around-gate transistor structure includes (i) semiconductor region, and (ii) a gate electrode region wrapping around the semiconductor region, wherein the gate electrode region is electrically insulated from the semiconductor region by a gate dielectric film; and (b) removing first and second portions of the wrap-around-gate transistor structure so as to form top and bottom gate electrodes from the gate electrode region, wherein the top and bottom gate electrodes are electrically disconnected from each other.
Public/Granted literature
- US20060172496A1 DOUBLE-GATE FETs (FIELD EFFECT TRANSISTORS) Public/Granted day:2006-08-03
Information query
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