Invention Grant
US07241420B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
有权
用于采用压力金属的液体拾取,运输和分配的毛细管通道探头
- Patent Title: Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
- Patent Title (中): 用于采用压力金属的液体拾取,运输和分配的毛细管通道探头
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Application No.: US10213059Application Date: 2002-08-05
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Publication No.: US07241420B2Publication Date: 2007-07-10
- Inventor: Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
- Applicant: Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
- Applicant Address: US CA Palo Alto
- Assignee: Palo Alto Research Center Incorporated
- Current Assignee: Palo Alto Research Center Incorporated
- Current Assignee Address: US CA Palo Alto
- Agency: Bever, Hoffman & Harms, LLP
- Agent Patrick T. Bever
- Main IPC: B01L3/02
- IPC: B01L3/02

Abstract:
Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
Public/Granted literature
- US20040022681A1 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal Public/Granted day:2004-02-05
Information query
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