Invention Grant
US07238956B2 Device for controlling an apparatus generating a charged particle beam
失效
用于控制产生带电粒子束的装置的装置
- Patent Title: Device for controlling an apparatus generating a charged particle beam
- Patent Title (中): 用于控制产生带电粒子束的装置的装置
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Application No.: US11245072Application Date: 2005-10-07
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Publication No.: US07238956B2Publication Date: 2007-07-03
- Inventor: Jacques Gierak , Peter Hawkes
- Applicant: Jacques Gierak , Peter Hawkes
- Applicant Address: FR Paris
- Assignee: Centre National de la Recherche Scientifique
- Current Assignee: Centre National de la Recherche Scientifique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: FR0114990 20011120
- Main IPC: G21G4/00
- IPC: G21G4/00
Abstract:
A device for adjusting a beam of charged particles. The device includes an adjustment mechanism for storing desired characteristics for the beam, determining values of adjustment parameters of the apparatus according to its characteristics, storing these values, and giving these stored values to the adjustment parameters of the apparatus. The device can be applied in particular to the manufacturing of nanostructures.
Public/Granted literature
- US20060027765A1 Adjusting device of an apparatus for generating a beam of charged particles Public/Granted day:2006-02-09
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