Invention Grant
- Patent Title: Transistors and manufacturing methods thereof
- Patent Title (中): 晶体管及其制造方法
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Application No.: US11027358Application Date: 2004-12-30
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Publication No.: US07208384B2Publication Date: 2007-04-24
- Inventor: Kwan-Ju Koh
- Applicant: Kwan-Ju Koh
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agent Andrew D. Fortney
- Priority: KR10-2003-0101924 20031231
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Transistors and manufacturing methods thereof are disclosed. An example transistor includes a semiconductor substrate divided into device isolation regions and a device active region. The example transistor includes a gate insulating film formed in the active region of the semiconductor substrate, a gate formed on the gate insulating film, a channel region formed in the semiconductor substrate and overlapping the gate, and LDD regions formed in the semiconductor substrate and at both sides of the gate, centering the gate. In addition, the example transistor includes source and drain regions formed under the LDD regions, offset regions formed in the semiconductor substrate and between the channel region and LDD regions, and gate spacers formed at both sidewalls of the gate.
Public/Granted literature
- US20050139876A1 Transistors and manufacturing methods thereof Public/Granted day:2005-06-30
Information query
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