Invention Grant
US07199727B2 Electrostatic encoder and electrostatic displacement measuring method 有权
静电编码器和静电位移测量方法

Electrostatic encoder and electrostatic displacement measuring method
Abstract:
An electrostatic encoder comprises a movable element having electrodes and a stator having induction electrodes and potential detection electrodes. The electrostatic encoder further comprises a voltage driving circuit configured to apply a voltage to the induction electrodes of the stator, and generate alternate potential distribution in the electrodes of the movable element by electrostatic induction, a vector generation circuit configured to generate a vector consisting of two signal components, from outputs of the potential detection electrodes of the stator which detect the alternate potential distribution, and a phase splitter circuit configured to measure the relative displacement of the movable element to the stator, from a rotation angle of the vector consisting of the two signal components outputted from the vector generation circuit.
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