发明授权
- 专利标题： Oxidation-resistant conducting perovskites
- 专利标题（中）： 耐氧化导电钙钛矿
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申请号： US10445414申请日： 2003-05-27
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公开(公告)号： US07095067B2公开(公告)日： 2006-08-22
- 发明人: Harold Y. Hwang , Akira Ohtomo , David Muller
- 申请人： Harold Y. Hwang , Akira Ohtomo , David Muller
- 申请人地址： US NJ Murray Hill
- 专利权人： Lucent Technologies Inc.
- 当前专利权人： Lucent Technologies Inc.
- 当前专利权人地址： US NJ Murray Hill
- 主分类号： H01L29/76
- IPC分类号： H01L29/76
摘要：
The present invention provides a semicondctor device that includes a conductor comprised of first and second layers of perovskite that have different stoichiometric compositions. The conductors provide a good template for the formation of dielectric layers thereon and are resistant to oxidizing environments used in semiconductor processing.
公开/授权文献
- US20040238861A1 Oxidation-resistant conducting perovskites 公开/授权日：2004-12-02
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