发明授权
- 专利标题： Pin detector apparatus and method of fabrication
- 专利标题（中）： 引脚检测装置及其制造方法
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申请号： US10765388申请日： 2004-01-27
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公开(公告)号： US07052927B1公开(公告)日： 2006-05-30
- 发明人: Christopher Lee Fletcher , Andrew G. Toth , Jerry R. Cripe
- 申请人： Christopher Lee Fletcher , Andrew G. Toth , Jerry R. Cripe
- 申请人地址： US MA Waltham
- 专利权人： Raytheon Company
- 当前专利权人： Raytheon Company
- 当前专利权人地址： US MA Waltham
- 代理商 William C. Schubert; Karl A. Vick
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A PIN detector device (190) is fabricated on a substrate (10). The substrate (10) includes a handle wafer portion (208), an implanted oxide layer (206), a backside contact layer (204) and an active wafer portion (202). The substrate (10) serves as a foundation to increase stability and facilitate handling during fabrication of electrical circuitry (248) on a surface of the active wafer portion (202). After the electrical circuitry fabrication processing is substantially complete, the handle wafer portion (208) and implanted oxide layer (206) are removed to expose the implanted backside contact layer (204).
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