Invention Grant
US07049195B2 Methods of fabricating non-volatile memory devices 失效
制造非易失性存储器件的方法

  • Patent Title: Methods of fabricating non-volatile memory devices
  • Patent Title (中): 制造非易失性存储器件的方法
  • Application No.: US10749608
    Application Date: 2003-12-30
  • Publication No.: US07049195B2
    Publication Date: 2006-05-23
  • Inventor: Kwan-Ju Koh
  • Applicant: Kwan-Ju Koh
  • Applicant Address: KR Seoul
  • Assignee: DongbuAnam Semiconductor Inc.
  • Current Assignee: DongbuAnam Semiconductor Inc.
  • Current Assignee Address: KR Seoul
  • Agent Andrew D. Fortney
  • Priority: KR10-2003-0006416 20030130
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Methods of fabricating non-volatile memory devices
Abstract:
The present disclosure is directed to a non-volatile memory device having a SONOS structure and a method of fabricating the same, wherein the non-volatile memory device having the SONOS structure is fabricated using a simple and lower cost method by greatly reducing the number of the photo engraving process. As disclosed herein, in one example a method of fabricating a non-volatile memory device includes forming a sacrificial oxide film on a semiconductor substrate and selectively etching the sacrificial oxide film to expose the semiconductor substrate with a predetermined width; injecting first conductive type impurity ions into the exposed semiconductor substrate to form a first semiconductor region, forming an additional oxide and nitride film on the entire upper surface of the semiconductor substrate in order; selectively etching the nitride film, the additional oxide, and the sacrificial oxide film to form a gate window which exposes the semiconductor substrate with a predetermined width; forming a gate oxide film over the entire upper surface of the semiconductor substrate; forming polysilicon layer on the gate oxide film to fill in the gate window; carrying out a CMP process until the sacrificial oxide film is exposed; removing the sacrificial oxide film, and the gate oxide film, the nitride film, and the additional oxide formed on the side wall of the polysilicon layer; injecting second conductive type impurity ions into portions of the semiconductor substrate, which corresponds to the outer part of the polysilicon layer, to form source and drain regions.
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