发明授权
US07038234B2 Thermoelectric module with Si/SiGe and B4C/B9C super-lattice legs
失效
具有Si / SiGe和B4C / B9C超晶格腿的热电模块
- 专利标题: Thermoelectric module with Si/SiGe and B4C/B9C super-lattice legs
- 专利标题(中): 具有Si / SiGe和B4C / B9C超晶格腿的热电模块
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申请号: US10818028申请日: 2004-04-05
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公开(公告)号: US07038234B2公开(公告)日: 2006-05-02
- 发明人: Saeid Ghamaty , Norbert B. Elsner , John C. Bass
- 申请人: Saeid Ghamaty , Norbert B. Elsner , John C. Bass
- 申请人地址: US CA San Diego
- 专利权人: Hi-Z Technology, Inc.
- 当前专利权人: Hi-Z Technology, Inc.
- 当前专利权人地址: US CA San Diego
- 代理商 John R. Ross; John R. Ross, III
- 主分类号: H01L29/09
- IPC分类号: H01L29/09 ; H01L31/328 ; H01L31/336 ; H01L31/72 ; H01L31/109
摘要:
A super-lattice thermoelectric device. The device includes p-legs and n-legs, each leg having a large number of alternating layers of two materials with differing electron band gaps. The n-legs in the device are comprised of alternating layers of silicon and silicon germanium. The p-legs includes alternating layers of B4C and B9C. In preferred embodiments the layers are about 100 angstroms thick. Applicants have fabricated and tested a first Si/SiGe (n-leg) and B4C/B9C (p-leg) quantum well thermocouple. Each leg was only 11 microns thick on a 5 micron Si substrate. Nevertheless, in actual tests the thermocouple operated with an amazing efficiency of 14 percent with a Th of 250 degrees C. Thermoelectric modules made according to the present invention are useful for both cooling applications as well as electric power generation. This preferred embodiment is a thermoelectric 10×10 egg crate type module about 6 cm×6 cm×0.76 cm designed to produce 70 Watts with a temperature difference of 300 degrees C with a module efficiency of about 30 percent.
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