Invention Grant
US07033875B2 MOS transistor and fabrication method thereof 失效
MOS晶体管及其制造方法

MOS transistor and fabrication method thereof
Abstract:
A MOS transistor and a method for fabricating the MOS transistor. The present invention enables implementation of a stable semiconductor device that is capable of protecting against leakage current generation by improving the “LDD effect” and securing a large process margin by adjusting an “off” current. The method for fabricating a MOS transistor includes placing or arranging an epitaxial layer between a silicon wafer and a gate electrode, and forming three impurity regions, including a very low concentration impurity region, and a low concentration impurity region and a high concentration impurity region (source and drain region).
Public/Granted literature
Information query
Patent Agency Ranking
0/0