Invention Grant
- Patent Title: Positive photosensitive polyimide resin composition
- Patent Title (中): 正光敏聚酰亚胺树脂组合物
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Application No.: US10488093Application Date: 2002-09-18
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Publication No.: US07026080B2Publication Date: 2006-04-11
- Inventor: Tomonari Nakayama , Masakazu Kato , Takayasu Nihira
- Applicant: Tomonari Nakayama , Masakazu Kato , Takayasu Nihira
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2001-293269 20010926
- International Application: PCT/JP02/09559 WO 20020918
- International Announcement: WO03/029899 WO 20030410
- Main IPC: G03F7/023
- IPC: G03F7/023

Abstract:
The invention provides a positive photosensitive resin composition which is free from film reduction, swelling or peeling at the time of development with an aqueous alkaline solution and which provides a dimensionally stable patterns after curing, and of which the final cured film has a low water absorption and excellent alkaline resistance. A positive photosensitive polyimide resin composition characterized by comprising an organic solvent-soluble polyimide having repeating units represented by the formula (1): (wherein m is an integer of from 3 to 10,000, R1 is a tetravalent organic group, R2 is a bivalent organic group, provided that from 5 to 100 mol % of R2 is a bivalent organic group having fluorine), a polyamic acid and a compound capable of generating an acid by irradiation with light.
Public/Granted literature
- US20040197699A1 Positive photosensitive polyimide resin composition Public/Granted day:2004-10-07
Information query
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