发明授权
- 专利标题: Self-assembled nanometer conductive bumps and method for fabricating
- 专利标题(中): 自组装纳米导电凸块及其制造方法
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申请号: US10653860申请日: 2003-09-03
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公开(公告)号: US06989325B2公开(公告)日: 2006-01-24
- 发明人: Ruoh-Huey Uang , Yu-Hua Chen
- 申请人: Ruoh-Huey Uang , Yu-Hua Chen
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 代理机构: Akin Gump Strauss Hauer & Feld, LLP
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A self-assembled nanometer conductive bump and a method for fabricating the bump. In the method, a multiplicity of carbon nanotubes that are coated at two ends with chemically functional groups is first provided. A substrate that is equipped with at least one bond pad on a surface is then positioned juxtaposed to the carbon nanotubes for forming a bond between the carbon nanotubes and the metal pads facilitated by a chemical affinity existed between the functional groups and the metal pad.
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