Invention Grant
- Patent Title: Method for manufacturing a dynamic quantity detection device
- Patent Title (中): 动态量检测装置的制造方法
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Application No.: US10404073Application Date: 2003-04-02
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Publication No.: US06960487B2Publication Date: 2005-11-01
- Inventor: Yasutoshi Suzuki , Shinji Yoshihara , Takahiko Yoshida
- Applicant: Yasutoshi Suzuki , Shinji Yoshihara , Takahiko Yoshida
- Applicant Address: JP Nishio JP Kariya
- Assignee: Nippon Soken, Inc.,Denso Corporation
- Current Assignee: Nippon Soken, Inc.,Denso Corporation
- Current Assignee Address: JP Nishio JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2002-107856 20020410
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L21/58 ; H01L29/84

Abstract:
A method for manufacturing a dynamic quantity detection device includes bonding a semiconductor chip that includes a detection element for detecting a dynamic quantity to a stand using a bonding layer. Initially, a semiconductor chip is formed that includes a detection element used for correlating a dynamic quantity to be detected to an electric quantity and a processing circuit element used for a circuit that processes the electric quantity. Further, a bonding layer is placed on a stand. The semiconductor chip is then placed on the bonding layer and the semiconductor chip is bonded to the stand by sintering the bonding layer at 400° C. or lower in order to suppress a change in a characteristic of the processing circuit element.
Public/Granted literature
- US20030194836A1 Method for manufacturing a dynamic quantity detection device Public/Granted day:2003-10-16
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