Invention Grant
- Patent Title: System and method for measuring object characteristics using phase differences in polarized light reflections
- Patent Title (中): 使用偏振光反射相位差来测量物体特性的系统和方法
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Application No.: US10660984Application Date: 2003-09-12
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Publication No.: US06956658B2Publication Date: 2005-10-18
- Inventor: Steven W. Meeks , Rusmin Kudinar
- Applicant: Steven W. Meeks , Rusmin Kudinar
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corporation
- Current Assignee: KLA-Tencor Technologies Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Fenwick & West LLP
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B11/30 ; G01N21/21 ; G01N21/47 ; G01N21/95 ; G11B5/84

Abstract:
A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film magnetic disks and silicon wafers at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat is provided. The system and method involve a focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. This generates both reflected and scattered light that may be measured to determine various values and properties related to the surface of the disk, including identifying the Kerr-effect in reflected light for determination of point magnetic properties. In addition, the present invention can mark the position of an identified defect.
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