发明授权
US06841033B2 Material handling system and method for a multi-workpiece plasma treatment system
失效
多工件等离子体处理系统的材料处理系统和方法
- 专利标题: Material handling system and method for a multi-workpiece plasma treatment system
- 专利标题(中): 多工件等离子体处理系统的材料处理系统和方法
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申请号: US09998875申请日: 2001-10-31
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公开(公告)号: US06841033B2公开(公告)日: 2005-01-11
- 发明人: Robert S. Condrashoff , James P. Fazio , David E. Hoffman , James S. Tyler
- 申请人: Robert S. Condrashoff , James P. Fazio , David E. Hoffman , James S. Tyler
- 申请人地址: US OH Westlake
- 专利权人: Nordson Corporation
- 当前专利权人: Nordson Corporation
- 当前专利权人地址: US OH Westlake
- 代理机构: Wood, Herron & Evans, L.L.P.
- 主分类号: H05H1/46
- IPC分类号: H05H1/46 ; H01L21/00 ; H01L21/02 ; H01L21/205 ; H01L21/3065 ; H01L21/677 ; C23F1/00 ; B65G49/07 ; C23C16/00 ; H01L21/306
摘要:
A plasma treatment system in which untreated workpieces are serially received one at a time on an infeed table but stored in parallel on the infeed table. The untreated workpieces are transferred simultaneously, in parallel, into a plasma treatment chamber. Thereafter, treated workpieces are transferred simultaneously, in parallel, out of the plasma treatment chamber onto an outfeed table; and the outfeed table serially discharges the treated workpieces one at a time from the outfeed table.
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