发明授权
US06841033B2 Material handling system and method for a multi-workpiece plasma treatment system 失效
多工件等离子体处理系统的材料处理系统和方法

Material handling system and method for a multi-workpiece plasma treatment system
摘要:
A plasma treatment system in which untreated workpieces are serially received one at a time on an infeed table but stored in parallel on the infeed table. The untreated workpieces are transferred simultaneously, in parallel, into a plasma treatment chamber. Thereafter, treated workpieces are transferred simultaneously, in parallel, out of the plasma treatment chamber onto an outfeed table; and the outfeed table serially discharges the treated workpieces one at a time from the outfeed table.
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