发明授权
US06838743B2 Optoelectronic material, device using the same and method for manufacturing optoelectronic material
有权
光电子材料,使用相同的器件和制造光电子材料的方法
- 专利标题: Optoelectronic material, device using the same and method for manufacturing optoelectronic material
- 专利标题(中): 光电子材料,使用相同的器件和制造光电子材料的方法
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申请号: US10372257申请日: 2003-02-25
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公开(公告)号: US06838743B2公开(公告)日: 2005-01-04
- 发明人: Yuka Yamada , Takehito Yoshida , Shigeru Takeyama , Yuji Matsuda , Katsuhiko Mutoh
- 申请人: Yuka Yamada , Takehito Yoshida , Shigeru Takeyama , Yuji Matsuda , Katsuhiko Mutoh
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP8-157840 19960619; JP8-315934 19961127; JP8-315957 19961127
- 主分类号: H01L21/203
- IPC分类号: H01L21/203 ; B01D53/78 ; H01L31/18 ; H01L33/00 ; H01L33/18 ; H01L33/26 ; H01L31/06 ; H01L31/0352
摘要:
This invention relates an optoelectronic material comprising a uniform medium with a controllable electric characteristic; and semiconductor ultrafine particles dispersed in the medium and having a mean particle size of 100 nm or less, and an application device using the same. This invention also relates to a method of manufacturing an optoelectronic material by irradiating a laser beam onto a first target of a semiconductor material, placed in a reaction chamber in low pressure rare gas ambient, and a second target of a medium material with a controllable electric characteristic, placed in the reaction chamber, condensing/growing a semiconductor material ablated from the first target to be collected as ultrafine particles having a mean particle size of 100 nm or smaller on a substrate placed in the reaction chamber, and condensing/growing a medium material ablated from the second target to be collected on the substrate placed in the reaction chamber, thus forming an ultrafine-particles dispersed layer having semiconductor ultrafine particles dispersed in the medium on the substrate.
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