发明授权
- 专利标题： BEOL decoupling capacitor
- 专利标题（中）： BEOL去耦电容
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申请号： US10323132申请日： 2002-12-19
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公开(公告)号： US06777809B2公开(公告)日： 2004-08-17
- 发明人: Peter Richard Duncombe , Daniel Charles Edelstein , Robert Benjamin Laibowitz , Deborah Ann Neumayer , Tak Hung Ning , Robert Rosenberg , Thomas Mcarraoll Shaw
- 申请人： Peter Richard Duncombe , Daniel Charles Edelstein , Robert Benjamin Laibowitz , Deborah Ann Neumayer , Tak Hung Ning , Robert Rosenberg , Thomas Mcarraoll Shaw
- 主分类号： H01L2348
- IPC分类号： H01L2348
摘要：
An amorphous dielectric material having a dielectric constant of 10 or greater is provided herein for use in fabricating capacitors in integrated circuit applications. The amorphous dielectric material is formed using temperatures below 450° C.; therefore the BEOL metallurgy is not adversely affected. The amorphous dielectric material of the present invention exhibits good conformality and a low leakage current. Damascene devices containing the capacitor of the present invention are also disclosed.
公开/授权文献
- US20030089943A1 BEOL decoupling capacitor 公开/授权日：2003-05-15
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