发明授权
- 专利标题： Method of transporting a reticle
- 专利标题（中）： 运输掩模版的方法
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申请号： US10256357申请日： 2002-09-26
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公开(公告)号： US06763608B2公开(公告)日： 2004-07-20
- 发明人: Giang T. Dao , Ronald J. Kuse
- 申请人： Giang T. Dao , Ronald J. Kuse
- 主分类号： F26B700
- IPC分类号： F26B700
摘要：
A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.
公开/授权文献
- US20030035096A1 Method of transporting a reticle 公开/授权日：2003-02-20
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