发明授权
US06729943B2 System and method for controlled polishing and planarization of semiconductor wafers
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用于半导体晶片受控抛光和平坦化的系统和方法
- 专利标题: System and method for controlled polishing and planarization of semiconductor wafers
- 专利标题(中): 用于半导体晶片受控抛光和平坦化的系统和方法
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申请号: US10025379申请日: 2001-12-18
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公开(公告)号: US06729943B2公开(公告)日: 2004-05-04
- 发明人: Rod Kistler , Yehiel Gotkis
- 申请人: Rod Kistler , Yehiel Gotkis
- 主分类号: B24B2900
- IPC分类号: B24B2900
摘要:
A system and method for polishing semiconductor wafers includes a rotatable polishing pad movably positionable in a plurality of partially overlapping configurations with respect to a semiconductor wafer. A pad dressing assembly positioned coplanar, and adjacent, to the wafer provides in-situ pad conditioning to a portion of the polishing pad not in contact with the wafer. The method includes the step of radially moving the polishing pad with respect to the wafer.
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